2020-12-24
Electronic special gas is widely used in high-tech industries such as semiconductors, microelectronics and related solar cells, or used for thin film deposition, etching, doping, passivation, cleaning, or as a carrier gas, protective atmosphere, and so on. As semiconductor and microelectronics technologies are developing toward higher performance and higher integration, higher and higher requirements are put forward for the purity of electronic special gas, and the purification of electronic special gas is becoming more and more critical and important. The domestic ultra-high purity purification technology mainly relies on imports, and its own technical level (6N) is far behind the international advanced level (8-9N). A well-known domestic project will design and develop a series of high-efficiency, high-capacity, high-selectivity, and low-cost new nano-purifiers, which will affect 5 series of MO sources, inert gases, hydride gases, reactive gases, and corrosive gases. A variety of electronic special gases are purified at the end to increase the purity of electronic special gases from ppm to ppb and ppt levels, and minimize the impact of special gas transmission and control systems on gas purity, thereby greatly improving process capacity and reducing products Defects, increase the yield of the process, and meet the needs of the next generation of semiconductors, microelectronics and related high-tech development. Zhongshan Optoelectronics will form an ultra-high-purity electronic special gas purificati